270x Filetype PPTX File size 1.16 MB Source: notendur.hi.is
Introduction
■ Scanning Electron Microscope (Zeiss Supra-25 SEM)
– History
– Instrumentation
– Theory
■ Samples
– Results & Different Uses
■ Image Capture
■ Elemental Analysis
■ Elemental Mapping
Image: http://www.physics.montana.edu/ical/instrumentation/fesem.html
SEM: Brief History
■ History
– First SEM was built by Manfred von Ardenne in Germany in 1937
– First SEM sold commercially 1965 (Cambridge Scientific Instrument Co.)
– First SEM in Iceland 1988 (NMI)
– The one we used: 2004
Image: https://www.vonardenne.biz/en/company/manfred-von-
ardenne/
Instrumentation
Electron Gun
Sample Stage
Samples under high vacuum
Camera & Detectors
Focus the Sample
X-ray detector
Image: http://nau.edu/cefns/labs/electron-microprobe/glg-510-class-
notes/instrumentation/
Instrumentation: Interaction Volume
• Depth & Width of the Interaction
Volume
• B
• Distance the electron penetrates the
sample
• r
Image: http://nau.edu/cefns/labs/electron-microprobe/glg-510-class-
notes/instrumentation/
Samples
■ MUST be conductive
■ Preferably flat & non-porous
■ Powders, etc. prepared in a conductive Bakelite casting & polished
■ If not conducting, must be coated with gold (imaging only)
■ Cannot use liquids
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