138x Filetype PPTX File size 1.70 MB Source: uomustansiriyah.edu.iq
Physical Vapor Deposition (PVD): PVD encompasses a group of vacuum techniques used for depositing . thin films of different materials onto various substrates by physical means. process is a dry vacuum deposition method to coat an entire object (or substrate) at once. The PVD reactive processes are a common method for depositing a hard coating of metal. They combine an active gas, such as nitrogen, oxygen, or methane with the plasma bombardment of the substrate. The main difference of PVD methods is the way they produce the metal vapor and the plasma. In general, it can be categorized into the following groups: 1- Mechanical 2- Evaporation 3- Sputtering 4- Ion plating 5- Pulse laser ( PLD and PLA) 1- Mechanical (milling) method • This method produces mechanical Nano-materials in powder form, where material is placed under a very high energy and milling by balls made of stainless . can be made Powder up in size from 3- 25 (nanometer). 2- Evaporation Evaporation Evaporation Thermal Thermal E-beam E-beam MBE evaporation MBE evaporation e vaporation e vaporation Evaporation: is one of the most common methods of thin film deposition. Although it is one of the oldest physical techniques, it is still widely used in the laboratory and in industry. In this process, a vapor is generated by evaporating or subliming a source material, which is subsequently condensed as a solid film on a substrate. 2.1. Thermal evaporation In thermal evaporation, the target material is melted and evaporated or sublimed using an electric resistance heater. In this process, the vapor pressure in the chamber (Figure bellow) is raised from the initially very low pressure to one that allows the material to be deposited on the substrate. This initial high vacuum is necessary because it allows the vapor to reach the substrate without reacting with or scattering by other atoms in the chamber. The deposition system consists of: 1. nozzle sprayer with (0.1-0.8)mm inner diameter and inlet for carrier gas (N2). 2. Heater (hot plate), for heating substrate. It is used for controlling the temperature of the substrate in which the film deposit on it 3. Temperature controller. It is use for measuring the temperature of heater and substrate .It connected with a digital counter to measure the temperature. 4. Chamber with ventilator. 5. Air compressor or gas propellant.
no reviews yet
Please Login to review.